Title :
No-Power MEMS Devices Using Buckled Diaphragms and Engineered Stress
Author :
Walsh, Kevin M. ; Gowrishetty, Usha R.
fDate :
June 28 2010-July 1 2010
Abstract :
Bi-stable mechanical actuators are of great interest and have begun to appear in the literature in the form of MEMS-based switches, micro-valves, micropumps, and mechanical memory devices. In this paper, we propose a new technique for fabricating bi-stable diaphragms using a combination of polyimide and oxide compressive stresses, and use it as the basic building block for a "Buckle-MEMS no-power" vacuum switch.
Keywords :
compressive strength; microactuators; microswitches; vacuum switches; bistable diaphragm; bistable mechanical actuator; buckle-MEMS no-power vacuum switch; buckled diaphragm; oxide compressive stress; polyimide; Actuators; Biomembranes; Compressive stress; Microelectromechanical devices; Micropumps; Microvalves; Polyimides; Silicon; Switches; Wet etching;
Conference_Titel :
Micro/Nano Symposium (UGIM), 2010 18th Biennial University/Government/Industry
Conference_Location :
West Lafayette, IN
Print_ISBN :
978-1-4244-4731-2
Electronic_ISBN :
0749-6877
DOI :
10.1109/UGIM.2010.5508932
