Title :
Demonstration of a Scalable Microfabrication Process for Arrayed Electrowetting Microprisms
Author :
Hou, Linlin ; Heikenfeld, Jason
Author_Institution :
Novel Devices Lab., Univ. of Cincinnati, Cincinnati, OH, USA
fDate :
June 28 2010-July 1 2010
Abstract :
A challenging non-planar scalable microfabrication process of arrayed electrowetting microprisms is reported. And an ~1500 element array of ~150 μm- size electrowetting microprisms is demonstrated.
Keywords :
Beam steering; Electrodes; Electrooptic devices; Fabrication; Holographic optical components; Holography; Laser radar; Liquid crystal displays; Optical arrays; Optical refraction;
Conference_Titel :
Micro/Nano Symposium (UGIM), 2010 18th Biennial University/Government/Industry
Conference_Location :
West Lafayette, IN, USA
Print_ISBN :
978-1-4244-4731-2
Electronic_ISBN :
0749-6877
DOI :
10.1109/UGIM.2010.5508933
