Retrofit of Sub-Atmospheric Gas Delivery Sources into an Ion Implanter

This paper presents a tested solution to the challenges of converting an existing ion implanter from a high-pressure gas delivery source to a sub-atmospheric vapor delivery source. Sub-atmospheric vapor sources are introduced and their benefits detailed. The design of the retrofit gas delivery system is described. Included in this discussion is the experience of working with modular, surface mount gas components required to create the gas stick. Also introduced are the vendor-provided CAD tools for designing the gas delivery module. The challenges overcome during the installation of the retrofit gas delivery system are explained. Finally, the operation of the retrofit system is presented.