Title :
Single and Multi-Scan Femtosecond Laser Writing for Selective Chemical Etching of Glass Micro-Channels
Author :
Ho, Stephen ; Ng, Mi Li ; Eaton, Shane M. ; Herman, Peter R. ; Aitchison, J.Stewart
Author_Institution :
Univ. of Toronto, Toronto
Abstract :
High aspect-ratio micro-channels were fabricated in fused silica using a high- repetition-rate 522-nm femtosecond laser and selective chemical etching with diluted hydrofluoric acid. Single and multi-scanning writing is compared for controlling cross-sectional profile and wall roughness.
Keywords :
etching; fibre lasers; glass; high-speed optical techniques; laser materials processing; micro-optomechanical devices; silicon compounds; SiO2; diluted hydrofluoric acid; fiber laser; fused silica; glass microchannels; high aspect-ratio microchannel fabrication; multiscan femtosecond laser writing; selective chemical etching; single-scanning writing; Chemical lasers; Etching; Fiber lasers; Glass; Hafnium; Optical pulses; Polarization; Silicon compounds; Ultrafast optics; Writing;
Conference_Titel :
Lasers and Electro-Optics, 2007. CLEO 2007. Conference on
Conference_Location :
Baltimore, MD
Print_ISBN :
978-1-55752-834-6
DOI :
10.1109/CLEO.2007.4452785
