Title :
Multi-Axis Electrothermal Scanning Micromirror with Low Driving Voltage
Author :
Jia, Kemiao ; Xie, Huikai
Author_Institution :
Univ. of Florida, Gainesville
Abstract :
This paper presents the design, fabrication and measurement results of a multi-axis electrothermal micromirror. This micromirror employs unique bimorph actuators to achieve one-dimensional piston motion and two-dimensional rotation.
Keywords :
low-power electronics; micromachining; micromirrors; optical design techniques; optical fabrication; 1D piston motion; 2D rotation; bimorph actuators; multi-axis electrothermal scanning micromirror; Actuators; Electrothermal effects; Etching; Low voltage; Micromirrors; Mirrors; Optical interferometry; Optical microscopy; Pistons; Structural beams;
Conference_Titel :
Lasers and Electro-Optics, 2007. CLEO 2007. Conference on
Conference_Location :
Baltimore, MD
Print_ISBN :
978-1-55752-834-6
DOI :
10.1109/CLEO.2007.4452788
