• DocumentCode
    3008339
  • Title

    Multi-Axis Electrothermal Scanning Micromirror with Low Driving Voltage

  • Author

    Jia, Kemiao ; Xie, Huikai

  • Author_Institution
    Univ. of Florida, Gainesville
  • fYear
    2007
  • fDate
    6-11 May 2007
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    This paper presents the design, fabrication and measurement results of a multi-axis electrothermal micromirror. This micromirror employs unique bimorph actuators to achieve one-dimensional piston motion and two-dimensional rotation.
  • Keywords
    low-power electronics; micromachining; micromirrors; optical design techniques; optical fabrication; 1D piston motion; 2D rotation; bimorph actuators; multi-axis electrothermal scanning micromirror; Actuators; Electrothermal effects; Etching; Low voltage; Micromirrors; Mirrors; Optical interferometry; Optical microscopy; Pistons; Structural beams;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics, 2007. CLEO 2007. Conference on
  • Conference_Location
    Baltimore, MD
  • Print_ISBN
    978-1-55752-834-6
  • Type

    conf

  • DOI
    10.1109/CLEO.2007.4452788
  • Filename
    4452788
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3008339