Title :
Micromachined Quantum-Well Air-Clad Waveguides
Author :
Stievater, T.H. ; Rabinovich, W.S. ; Park, DaeLim
Author_Institution :
Naval Res. Lab., Washington
Abstract :
We have used surface micromachining to fabricate suspended InGaAs quantum well waveguides that are supported by lateral tethers. Their enhanced electro-optical and nonlinear-optical properties will be discussed.
Keywords :
III-V semiconductors; electro-optical devices; gallium arsenide; indium compounds; integrated optics; micromachining; nonlinear optics; optical fabrication; optical waveguides; quantum well devices; InGaAs; air-clad waveguides; electrooptical properties; lateral tethers; nonlinear-optical properties; quantum-well waveguides; surface micromachiiimg; Nonlinear optics; Optical devices; Optical sensors; Optical surface waves; Optical waveguides; Propagation losses; Quantum well devices; Quantum wells; Semiconductor waveguides; Wavelength measurement;
Conference_Titel :
Lasers and Electro-Optics, 2007. CLEO 2007. Conference on
Conference_Location :
Baltimore, MD
Print_ISBN :
978-1-55752-834-6
DOI :
10.1109/CLEO.2007.4452790
