Title :
Dynamics and control of piezotube actuators for subnanometer precision applications
Author :
Ohara, Tetsuo ; Youcef-Toumi, K.
Author_Institution :
Dept. of Mech. Eng., MIT, Cambridge, MA, USA
Abstract :
For the purpose of scanning probe microscope (SPM) design and control, the piezotube actuator dynamics were modeled as a simple forced bar/beam vibration with a mass attached at the end. Based on the model, a high speed and high precision displacement sensor (piezoelectric sensor) was proposed using an observer design. Experimental data are also shown to support the presented model
Keywords :
control system analysis; displacement measurement; dynamics; frequency response; observers; physical instrumentation control; piezoelectric actuators; piezoelectric devices; scanning probe microscopy; displacement sensor; observer; piezoelectric sensor; piezotube actuators; scanning probe microscope; simple forced bar/beam vibration; subnanometer precision applications; Boundary conditions; Capacitive sensors; Damping; Equations; Frequency; Hydraulic actuators; Impedance; Shape; Stress; Voltage;
Conference_Titel :
American Control Conference, Proceedings of the 1995
Conference_Location :
Seattle, WA
Print_ISBN :
0-7803-2445-5
DOI :
10.1109/ACC.1995.533852
