Title :
A normally-closed, bimetallically actuated 3-way microvalve for pneumatic applications
Author :
Messner, S. ; Müller, M. ; Burger, V. ; Schaible, J. ; Sandmaier, H. ; Zengerle, R.
Author_Institution :
Hahn-Schickard-Gesellschaft, Inst. of Micromachining & Inf. Technol., Villingen-Schwenningen, Germany
Abstract :
A new normally-closed 3-way microvalve for pneumatic applications is presented for the first time. The valve is driven by a bimetallic actuation principle. This paper discusses the dimensioning and design, the fabrication and the experimental results of the 3-way valve. The valve is designed to control differential pressures of 1000 kPa. Flow rates up to 800 ml/min for dry air at 600 kPa can be achieved. The power consumption is about 1 W. The valve has been tested successfully in an ambient temperature range from 0 to 50°C
Keywords :
bimetals; electropneumatic control equipment; microactuators; semiconductor technology; valves; 0 to 50 C; 1 W; 3-way valve; 600 kPa; Si; bimetallically actuated 3-way microvalve; design; differential pressures; dimensioning; dry air; fabrication; pneumatic applications; power consumption; Actuators; Biomembranes; Energy consumption; Fabrication; Gases; Micromachining; Microvalves; Orifices; Temperature distribution; Valves;
Conference_Titel :
Micro Electro Mechanical Systems, 1998. MEMS 98. Proceedings., The Eleventh Annual International Workshop on
Conference_Location :
Heidelberg
Print_ISBN :
0-7803-4412-X
DOI :
10.1109/MEMSYS.1998.659726
