Title :
Gated Field Emitter Scaling
Author :
McGruer, N.E. ; Huang, Z.
Author_Institution :
Northeastern University
Keywords :
Atomic measurements; Current density; Diodes; Electrostatics; Geometry; Integrated circuit modeling; Packaging; Solid modeling; Sputtering; Threshold voltage;
Conference_Titel :
Vacuum Microelectronics Conference, 1993., Proceedings of IEEE 6th International
Print_ISBN :
0-7803-0852-2
DOI :
10.1109/IVMC.1993.700317
