Title :
Microfabricated capillarity-driven stop valve and sample injector
Author :
Man, P.E. ; Mastrangelo, C.H. ; Burns, M.A. ; Burke, T.
Author_Institution :
Center for Integrated Sensors & Circuits, Michigan Univ., Ann Arbor, MI, USA
Abstract :
This paper presents the design, fabrication, and testing of passive plastic microfluidic valves and active injectors driven by capillary forces. The passive valves stop the flow of a liquid inside a capillary using a capillary pressure barrier that develops when the channel cross section changes abruptly. Two types of valves with vertical and horizontal neck regions were fabricated yielding pressure barriers ranging from 1-6 kPa. Introducing asymmetry in the neck region, unidirectional valving action was achieved. The passive valving devices were used in combination with two electrodes to implement a sample injector. The injector uses an electrolytically-generated O2 bubble that raises the liquid pressure beyond the barrier thus reestablishing flow with as little as 150 μW of electrical power
Keywords :
capillarity; microactuators; semiconductor technology; valves; 1 to 6 kPa; 150 muW; O2; O2 bubble; active injectors; asymmetry; capillary forces; capillary pressure barrier; design; electrolytically-generated bubble; fabrication; horizontal neck regions; liquid pressure; microfabricated capillarity-driven stop valve; passive plastic microfluidic valves; pressure barriers; sample injector; testing; unidirectional valving action; vertical and horizontal neck regions; Chemical engineering; Chemical sensors; Circuit testing; Electrodes; Fabrication; Micromachining; Neck; Plastics; Reservoirs; Valves;
Conference_Titel :
Micro Electro Mechanical Systems, 1998. MEMS 98. Proceedings., The Eleventh Annual International Workshop on
Conference_Location :
Heidelberg
Print_ISBN :
0-7803-4412-X
DOI :
10.1109/MEMSYS.1998.659727