Title :
6402-matrix Silicon Field Emitter Array
Author :
Betsui, Keiichi ; Toyoda, Osamu ; Ishii, Tomoyuki ; Kondo, Nobuyoshi ; Fukuta, Shin Ya
Author_Institution :
Fujitsu Laboratories Ltd.
Keywords :
Etching; Field emitter arrays; Insulation; Ion implantation; Metal-insulator structures; Microelectronics; Oxidation; Pixel; Silicon; Vacuum technology;
Conference_Titel :
Vacuum Microelectronics Conference, 1993., Proceedings of IEEE 6th International
Print_ISBN :
0-7803-0852-2
DOI :
10.1109/IVMC.1993.700318
