Title :
Advances in Two-Photon 3D Microfabrication
Author :
Perry, Joseph W. ; Chen, Vincent W. ; Haske, Wojciech ; Hales, Joel M. ; Dong, Wenting ; Zhou, Jian ; Zhang, Yadong ; Perry, Kelly J. ; Barlow, Stephen ; Marder, Seth R.
Author_Institution :
Georgia Inst. of Technol., Atlanta
Abstract :
The development of two-photon materials for the fabrication of features with 80 nm resolution in 3D microfabrication and the fabrication of a range of photonic crystals with mid-IR stop bands will be discussed.
Keywords :
micro-optics; optical polymers; photolithography; photonic crystals; two-photon processes; 3D microfabrication; lithography; mid-IR stop bands; polymeric photonic crystals; two-photon materials; Absorption; Crystalline materials; Laser excitation; Lithography; Microstructure; Optical device fabrication; Optical materials; Photonic crystals; Polymers; Resins;
Conference_Titel :
Lasers and Electro-Optics, 2007. CLEO 2007. Conference on
Conference_Location :
Baltimore, MD
Print_ISBN :
978-1-55752-834-6
DOI :
10.1109/CLEO.2007.4452829
