DocumentCode
3009041
Title
Advances in Two-Photon 3D Microfabrication
Author
Perry, Joseph W. ; Chen, Vincent W. ; Haske, Wojciech ; Hales, Joel M. ; Dong, Wenting ; Zhou, Jian ; Zhang, Yadong ; Perry, Kelly J. ; Barlow, Stephen ; Marder, Seth R.
Author_Institution
Georgia Inst. of Technol., Atlanta
fYear
2007
fDate
6-11 May 2007
Firstpage
1
Lastpage
2
Abstract
The development of two-photon materials for the fabrication of features with 80 nm resolution in 3D microfabrication and the fabrication of a range of photonic crystals with mid-IR stop bands will be discussed.
Keywords
micro-optics; optical polymers; photolithography; photonic crystals; two-photon processes; 3D microfabrication; lithography; mid-IR stop bands; polymeric photonic crystals; two-photon materials; Absorption; Crystalline materials; Laser excitation; Lithography; Microstructure; Optical device fabrication; Optical materials; Photonic crystals; Polymers; Resins;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics, 2007. CLEO 2007. Conference on
Conference_Location
Baltimore, MD
Print_ISBN
978-1-55752-834-6
Type
conf
DOI
10.1109/CLEO.2007.4452829
Filename
4452829
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