DocumentCode
3009106
Title
Three-dimensional laser nano-structuring: contrast in three-photon and two-photon polymerization of SU-8
Author
Abolghasemi, Ladan E. ; Eaton, Shane ; Hosseini, Abbas ; Herman, Peter R.
Author_Institution
Univ. of Toronto, Toronto
fYear
2007
fDate
6-11 May 2007
Firstpage
1
Lastpage
2
Abstract
A femtosecond fiber laser with 100-kHz repetition rate was optimized for 3-D nanostructuring of photoresist. Contrasts in three-photon (1045 nm) and two-photon (522 nm) resolution are presented together with prospects for creating photonic crystal templates and optical phase masks.
Keywords
fibre lasers; high-speed optical techniques; nanopatterning; photoresists; polymerisation; polymers; two-photon processes; 3-D nanostructuring; femtosecond fiber laser; frequency 100 kHz; optical phasemasks; photonic crystal templates; photoresist; three-dimensional laser nanostructuring; three-photon polymerization; two-photon polymerization; Chemical lasers; Fiber lasers; High speed optical techniques; Laser theory; Optical device fabrication; Optical polymers; Optical pulses; Photonic crystals; Resists; Ultrafast optics;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics, 2007. CLEO 2007. Conference on
Conference_Location
Baltimore, MD
Print_ISBN
978-1-55752-834-6
Type
conf
DOI
10.1109/CLEO.2007.4452834
Filename
4452834
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