Title :
Three-dimensional laser nano-structuring: contrast in three-photon and two-photon polymerization of SU-8
Author :
Abolghasemi, Ladan E. ; Eaton, Shane ; Hosseini, Abbas ; Herman, Peter R.
Author_Institution :
Univ. of Toronto, Toronto
Abstract :
A femtosecond fiber laser with 100-kHz repetition rate was optimized for 3-D nanostructuring of photoresist. Contrasts in three-photon (1045 nm) and two-photon (522 nm) resolution are presented together with prospects for creating photonic crystal templates and optical phase masks.
Keywords :
fibre lasers; high-speed optical techniques; nanopatterning; photoresists; polymerisation; polymers; two-photon processes; 3-D nanostructuring; femtosecond fiber laser; frequency 100 kHz; optical phasemasks; photonic crystal templates; photoresist; three-dimensional laser nanostructuring; three-photon polymerization; two-photon polymerization; Chemical lasers; Fiber lasers; High speed optical techniques; Laser theory; Optical device fabrication; Optical polymers; Optical pulses; Photonic crystals; Resists; Ultrafast optics;
Conference_Titel :
Lasers and Electro-Optics, 2007. CLEO 2007. Conference on
Conference_Location :
Baltimore, MD
Print_ISBN :
978-1-55752-834-6
DOI :
10.1109/CLEO.2007.4452834
