Title :
Tunable Fabry-Perot Waveguide Microcavities with High Index Contrast Mirrors
Author :
Pruessner, Marcel W. ; Stievater, Todd H. ; Rabinovich, William S.
Author_Institution :
Naval Res. Lab., Washington
Abstract :
Tunable micromachined SOI Fabry-Perot waveguide cavities with high-index-contrast silicon/air Bragg mirrors are demonstrated. The devices can be tuned thermo-optically or using integrated micro-electro-mechanical systems. Device fabrication, experimental data, and simulation results will be presented.
Keywords :
Bragg gratings; microcavities; micromechanical devices; mirrors; optical waveguides; silicon-on-insulator; thermo-optical devices; high index contrast mirrors; integrated microelectro-mechanical systems; micromachined SOI; silicon-air Bragg mirrors; thermooptics; tunable Fabry-Perot waveguide microcavities; Distributed Bragg reflectors; Fabry-Perot; Heating; Microcavities; Microelectromechanical systems; Mirrors; Optical resonators; Optical tuning; Optical waveguides; Silicon;
Conference_Titel :
Lasers and Electro-Optics, 2007. CLEO 2007. Conference on
Conference_Location :
Baltimore, MD
Print_ISBN :
978-1-55752-834-6
DOI :
10.1109/CLEO.2007.4452844
