Title :
Diffractive Optical Elements based Single-Step Fabrication of 3-Dimensional Photonic Crystal Templates
Author :
Chanda, Debashis ; Herman, Peter R.
Author_Institution :
Univ. of Toronto, Toronto
Abstract :
A single laser exposure method of forming three-dimensional photonic crystal templates in photoresist has been demonstrated with multi-layer diffractive optical elements. Several photonic stopbands are identified in the near-infrared spectrum along multiple crystallographic directions.
Keywords :
diffractive optical elements; laser materials processing; optical fabrication; optical materials; optical multilayers; photonic crystals; photoresists; multilayer diffractive optical element; multiple crystallographic directions; near-infrared spectrum; photonic crystal template fabrication; photonic stopband; photoresist; single laser exposure; Holographic optical components; Holography; Interference; Lithography; Optical device fabrication; Optical diffraction; Optical sensors; Photonic crystals; Resists; US Department of Energy;
Conference_Titel :
Lasers and Electro-Optics, 2007. CLEO 2007. Conference on
Conference_Location :
Baltimore, MD
Print_ISBN :
978-1-55752-834-6
DOI :
10.1109/CLEO.2007.4452888