Title :
Dynamics of response of In2O3-Ga2O3 gas sensors
Author :
Demin, Ivan E. ; Kozlov, Alexander G.
Author_Institution :
Dept. of Phys., Omsk F. M. Dostoevsky State Univ., Omsk, Russia
Abstract :
The In2O3-Ga2O3 composite films have been prepared with pulsed laser deposition. The structural and electrophysical studies were performed. The temperature and time dependences of the gas response of the films on ethanol, acetone, ammonia and liquefied petroleum gas at the temperature range 20-750 °C were investigated. The activation energies of transient processes taking place during gas detection were calculated from the temperature dependences of time constants of gas response.
Keywords :
ammonia; composite materials; gallium compounds; gas sensors; indium compounds; organic compounds; petroleum; pulsed laser deposition; temperature measurement; temperature sensors; thin film sensors; time measurement; In2O3-Ga2O3; acetone; activation energy; ammonia; composite film; electrophysical study; ethanol; gas sensor; liquefied petroleum gas; pulsed laser deposition; structural study; temperature 20 degC to 750 degC; transient processing; Actuators; Films; Gas detectors; Pulsed laser deposition; Temperature dependence; Temperature sensors; Gallium oxide; gas sensors; indium oxide; pulsed laser deposition; semiconductor oxides;
Conference_Titel :
Control and Communications (SIBCON), 2015 International Siberian Conference on
Conference_Location :
Omsk
Print_ISBN :
978-1-4799-7102-2
DOI :
10.1109/SIBCON.2015.7147037
