Dynamics of response of In2O3-Ga2O3 gas sensors

Author

Demin, Ivan E. ; Kozlov, Alexander G.

Author_Institution

Dept. of Phys., Omsk F. M. Dostoevsky State Univ., Omsk, Russia

fYear

2015

fDate

21-23 May 2015

Firstpage

1

Lastpage

4

Abstract

The In₂O₃-Ga₂O₃ composite films have been prepared with pulsed laser deposition. The structural and electrophysical studies were performed. The temperature and time dependences of the gas response of the films on ethanol, acetone, ammonia and liquefied petroleum gas at the temperature range 20-750 °C were investigated. The activation energies of transient processes taking place during gas detection were calculated from the temperature dependences of time constants of gas response.

Keywords

ammonia; composite materials; gallium compounds; gas sensors; indium compounds; organic compounds; petroleum; pulsed laser deposition; temperature measurement; temperature sensors; thin film sensors; time measurement; In₂O₃-Ga₂O₃; acetone; activation energy; ammonia; composite film; electrophysical study; ethanol; gas sensor; liquefied petroleum gas; pulsed laser deposition; structural study; temperature 20 degC to 750 degC; transient processing; Actuators; Films; Gas detectors; Pulsed laser deposition; Temperature dependence; Temperature sensors; Gallium oxide; gas sensors; indium oxide; pulsed laser deposition; semiconductor oxides;

fLanguage

English

Publisher

ieee

Conference_Titel

Control and Communications (SIBCON), 2015 International Siberian Conference on

Conference_Location

Omsk

Print_ISBN

978-1-4799-7102-2

Type

conf

DOI

10.1109/SIBCON.2015.7147037

Filename

7147037