Title :
IEEE/SEMI International Semiconductor Manufacturing Science Symposium (Cat. No.92CH3161-7)
Abstract :
The following topics are dealt with: manufacturing performance characterization; personal empowerment, teamwork, and organizational issues; productivity tools and systems; and evolving technology
Keywords :
integrated circuit manufacture; management; production control; evolving technology; manufacturing performance characterization; organizational issues; personal empowerment; productivity systems; productivity tools; semiconductor manufacturing; teamwork;
Conference_Titel :
Semiconductor Manufacturing Science Symposium, 1992. ISMSS 1992., IEEE/SEMI International
Conference_Location :
San Francisco, CA, USA
Print_ISBN :
0-7803-0680-5
DOI :
10.1109/ISMSS.1992.197615
