Title :
From trendcharts to control charts: setup tests for making the leap
Author_Institution :
Digital Equipment Corp., Hudson, MA, USA
Abstract :
The early stages of industrial SPC (statistical process control) programs are typically characterized by trendcharts at critical process steps. As processes are brought under control, these trendcharts are replaced by control charts. But premature replacement of trendcharts by control charts, before processes are under control, may undermine the credibility of nascent SPC programs, causing a barrage of special cause flags triggered by limits inappropriately calculated on unstable processes. The author describes an operational definition of the term under control as needed to decided which trendcharts can be implemented on control charts. Simple rules, which derive from Monte Carlo simulations of special cause flags from W.A. Shewhart (1931) and L.S. Nelson (1984), provide constant and low probabilities of inappropriate process rejection and maintain the high efficiency of time series analysis intrinsic to traditional special cause flags. The rules depend heavily on sample size; it is shown that any attempt to ignore the effects of sample size will invite wildly uncontrolled risks of rejection good processes. A table is provided to facilitate application of these setup tests at a constant and low risk of rejecting good processes
Keywords :
integrated circuit manufacture; statistical process control; IC manufacture; Monte Carlo simulations; SPC; control charts; effects of sample size; operational definition; risks of rejection good processes; setup tests; special cause flags; statistical process control; trendcharts; CMOS technology; Control charts; Electronic switching systems; Manufacturing industries; Manufacturing processes; Production; Semiconductor device manufacture; Semiconductor device testing; Statistics; Time series analysis;
Conference_Titel :
Semiconductor Manufacturing Science Symposium, 1992. ISMSS 1992., IEEE/SEMI International
Conference_Location :
San Francisco, CA
Print_ISBN :
0-7803-0680-5
DOI :
10.1109/ISMSS.1992.197626