Title :
IC performance prediction from electrical test measurements
Author :
Boskin, Eric D. ; Spanos, Costas J. ; Korsh, George
Author_Institution :
Dept. of Electr. Eng. & Comput. Sci., California Univ., Berkeley, CA, USA
Abstract :
A model for integrated circuit (IC) binning has been built using measurements collected on a high-volume manufacturing line. This model uses electrical measurements collected before packaging in order to predict the high-speed performance of manufactured parts before final test. A small set of measurable parameters responsible for the variation in fabricated parts was identified. The statistically significant, linear performance prediction model was built using data from a 1-Mbit CMOS EPROM production line. The applications of the model include aiding the packaging decision, production planning and scheduling, process characterization, and control and design for manufacturability
Keywords :
CMOS integrated circuits; EPROM; VLSI; integrated circuit testing; packaging; production testing; quality control; semiconductor process modelling; 1 Mbit; CMOS; EPROM; IC binning; IC performance prediction; ULSI; VLSI; design for manufacturability; electrical measurements; electrical test measurements; high-speed performance; high-volume manufacturing line; linear performance prediction model; measurable parameters; measurement before packaging; model; packaging decision; process characterization; production line; production planning; scheduling; Circuit testing; Electric variables measurement; Integrated circuit manufacture; Integrated circuit measurements; Integrated circuit modeling; Integrated circuit testing; Packaging; Predictive models; Semiconductor device modeling; Virtual manufacturing;
Conference_Titel :
Semiconductor Manufacturing Science Symposium, 1992. ISMSS 1992., IEEE/SEMI International
Conference_Location :
San Francisco, CA
Print_ISBN :
0-7803-0680-5
DOI :
10.1109/ISMSS.1992.197628