• DocumentCode
    3011186
  • Title

    Current transport in MIM Structures

  • Author

    Racko, J. ; Harmatha, Ladislav ; Schwierz, Frank ; Granzner, Ralf ; Breza, Juraj ; Frohlich, Karol

  • Author_Institution
    Slovak Univ. of Technol., Bratislava, Slovakia
  • fYear
    2009
  • fDate
    13-17 May 2009
  • Firstpage
    1
  • Lastpage
    4
  • Abstract
    We present a new model of current transport in MIM structures due to quantum mechanical tunnelling. In addition to direct tunnelling through an insulating layer with high permittivity (high-k layer), an important role belongs also to tunnelling via defects present in the insulating layer.
  • Keywords
    MIM structures; permittivity; tunnelling; MIM structures; current transport; insulating layer; permittivity; quantum mechanical tunnelling; Charge carrier processes; Electron traps; High K dielectric materials; High-K gate dielectrics; Insulation; Metal-insulator structures; Permittivity; Radiative recombination; Spontaneous emission; Tunneling;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electronics Technology, 2009. ISSE 2009. 32nd International Spring Seminar on
  • Conference_Location
    Brno
  • Print_ISBN
    978-1-4244-4260-7
  • Type

    conf

  • DOI
    10.1109/ISSE.2009.5206999
  • Filename
    5206999
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3011186