Title :
Current transport in MIM Structures
Author :
Racko, J. ; Harmatha, Ladislav ; Schwierz, Frank ; Granzner, Ralf ; Breza, Juraj ; Frohlich, Karol
Author_Institution :
Slovak Univ. of Technol., Bratislava, Slovakia
Abstract :
We present a new model of current transport in MIM structures due to quantum mechanical tunnelling. In addition to direct tunnelling through an insulating layer with high permittivity (high-k layer), an important role belongs also to tunnelling via defects present in the insulating layer.
Keywords :
MIM structures; permittivity; tunnelling; MIM structures; current transport; insulating layer; permittivity; quantum mechanical tunnelling; Charge carrier processes; Electron traps; High K dielectric materials; High-K gate dielectrics; Insulation; Metal-insulator structures; Permittivity; Radiative recombination; Spontaneous emission; Tunneling;
Conference_Titel :
Electronics Technology, 2009. ISSE 2009. 32nd International Spring Seminar on
Conference_Location :
Brno
Print_ISBN :
978-1-4244-4260-7
DOI :
10.1109/ISSE.2009.5206999
