Title :
A novel asymmetric silicon micro-mirror for optical beam scanning display
Author :
Yamada, K. ; Kuriyama, T.
Author_Institution :
ULSI Application Res. Lab., NEC Corp., Kanagawa, Japan
Abstract :
A simple asymmetric micro-mirror excited by an external piezoelectric ceramic vibrating element was shown to be effective for scanning an optical beam with an over-video-rate operating frequency at an over-30-degree beam-scanning angle. Using an SOI process simplifies the fabrication process and results in a very flat mirror surface. A structure consisting of two such mirrors (one horizontal and one vertical) was used to reproduce half-VGA computer images. The space effectiveness of this silicon micro-minor optical-beam scanner was demonstrated in a super-small wearable micro-mirror display device. Full VGA and XGA displays should be possible by adding simple signal processing
Keywords :
crystal resonators; display devices; elemental semiconductors; integrated optics; micromechanical devices; mirrors; silicon; silicon-on-insulator; SOI process; Si; Si micro-minor optical-beam scanner; Si micro-mirror; VGA displays; XGA displays; asymmetric micro-mirror; external piezoelectric ceramic vibrating element; fabrication process; flat mirror surface; half-VGA computer images; micro-mirror display; optical beam scanning display; over-video-rate operating frequency; signal processing; space effectiveness; Bars; Ceramics; Computer displays; Frequency; Laboratories; Mirrors; Optical beams; Optical signal processing; Resonance; Silicon;
Conference_Titel :
Micro Electro Mechanical Systems, 1998. MEMS 98. Proceedings., The Eleventh Annual International Workshop on
Conference_Location :
Heidelberg
Print_ISBN :
0-7803-4412-X
DOI :
10.1109/MEMSYS.1998.659738
