Title :
Low-Loss Silicon Wire Waveguides with 3-D Tapered Couplers Fabricated by Self Profile Transformation
Author :
Lee, Ming-Chang M. ; Chiu, Wei-Chao ; Yang, Tse-Ming ; Chen, Chin-Hung ; Wu, Ming C.
Author_Institution :
Nat. Tsing Hua Univ., Hsinchu
Abstract :
A novel low-loss silicon wire waveguide as well as 3-D tapered couplers is demonstrated by self profile transformation for the first time. The preliminary experimental results show the propagation loss is 2 dB/cm and the coupler loss is 2.7 dB.
Keywords :
integrated optics; optical couplers; optical waveguides; silicon; 3D tapered couplers; Si; propagation loss; self profile transformation; silicon wire waveguides; Annealing; Hydrogen; Nonlinear optics; Optical devices; Optical fiber couplers; Optical pumping; Optical waveguides; Propagation losses; Silicon; Wire;
Conference_Titel :
Lasers and Electro-Optics, 2007. CLEO 2007. Conference on
Conference_Location :
Baltimore, MD
Print_ISBN :
978-1-55752-834-6
DOI :
10.1109/CLEO.2007.4452954
