Title :
Vendor/customer alliance for furnace upgrade
Author :
Bayne, Chris ; Guiver, Chris ; Bhakta, Jay ; Hartshorn, Ross ; Schuler, John
Author_Institution :
Direction Inc., Sunnyvale, CA, USA
Abstract :
Describes a cooperative, joint development effort between Advanced Micro Devices Inc. and Direction Inc. to improve the technology of horizontal diffusion furnaces. Direction Inc. provided a prototype capsule system and gas injector. Advanced Micro Devices made available a production furnace and measuring equipment. The cross functional team representing disciplines of marketing, development, process, and equipment engineering was able to test the capsule system in a production environment. A matrix of tests on different wafer configurations and gas flows was conducted. Modifications and improvements to the system were made as a result of operating experience with the capsule system
Keywords :
furnaces; integrated circuit manufacture; production testing; Advanced Micro Devices; Direction; capsule system; equipment engineering; furnace upgrade; gas injector; horizontal diffusion furnaces; marketing; production environment test; production furnace; wafer configurations; Circuit testing; Furnaces; Job shop scheduling; Laboratories; Marketing and sales; Oxidation; Personnel; Production facilities; Semiconductor device manufacture; System testing;
Conference_Titel :
Semiconductor Manufacturing Science Symposium, 1992. ISMSS 1992., IEEE/SEMI International
Conference_Location :
San Francisco, CA
Print_ISBN :
0-7803-0680-5
DOI :
10.1109/ISMSS.1992.197647
