• DocumentCode
    3011787
  • Title

    Efficient, Broadband and Compact Metal Grating Couplers for Silicon-on-Insulator Waveguides

  • Author

    Scheerlinck, Stijn ; Schrauwen, Jonathan ; Taillaert, Dirk ; Thourhout, Dries Van ; Baets, Roel

  • Author_Institution
    IMEC - Ghent Univ., Ghent
  • fYear
    2007
  • fDate
    6-11 May 2007
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    Metal grating couplers for Silicon-on-Insulator waveguides are proposed. A silver grating coupler with 33% coupling efficiency is designed. A gold grating coupler prototype is fabricated using Focused Ion Beams demonstrating over 10% coupling efficiency.
  • Keywords
    optical couplers; optical waveguides; silicon-on-insulator; compact metal grating couplers; silicon-on-insulator waveguides; Etching; Gold; Gratings; Integrated optics; Optical coupling; Optical fiber couplers; Optical waveguides; Prototypes; Silicon on insulator technology; Silver;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics, 2007. CLEO 2007. Conference on
  • Conference_Location
    Baltimore, MD
  • Print_ISBN
    978-1-55752-834-6
  • Type

    conf

  • DOI
    10.1109/CLEO.2007.4452981
  • Filename
    4452981
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3011787