Title :
Efficient, Broadband and Compact Metal Grating Couplers for Silicon-on-Insulator Waveguides
Author :
Scheerlinck, Stijn ; Schrauwen, Jonathan ; Taillaert, Dirk ; Thourhout, Dries Van ; Baets, Roel
Author_Institution :
IMEC - Ghent Univ., Ghent
Abstract :
Metal grating couplers for Silicon-on-Insulator waveguides are proposed. A silver grating coupler with 33% coupling efficiency is designed. A gold grating coupler prototype is fabricated using Focused Ion Beams demonstrating over 10% coupling efficiency.
Keywords :
optical couplers; optical waveguides; silicon-on-insulator; compact metal grating couplers; silicon-on-insulator waveguides; Etching; Gold; Gratings; Integrated optics; Optical coupling; Optical fiber couplers; Optical waveguides; Prototypes; Silicon on insulator technology; Silver;
Conference_Titel :
Lasers and Electro-Optics, 2007. CLEO 2007. Conference on
Conference_Location :
Baltimore, MD
Print_ISBN :
978-1-55752-834-6
DOI :
10.1109/CLEO.2007.4452981
