• DocumentCode
    3011813
  • Title

    Polysilicon-on-Insulator Photonic Devices

  • Author

    Preston, Kyle ; Lipson, Michal

  • Author_Institution
    Cornell Univ., Ithaca
  • fYear
    2007
  • fDate
    6-11 May 2007
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    We demonstrate ring resonators with Q = 4,000 using poly crystalline silicon annealed at a low temperature of 600degC, which is compatible with standard CMOS processes.
  • Keywords
    CMOS integrated circuits; integrated optics; laser beam annealing; optical resonators; CMOS process; annealing; photonic devices; polysilicon on insulator; ring resonators; temperature 600 degC; Annealing; Optical devices; Optical losses; Optical resonators; Optical ring resonators; Optical scattering; Optical waveguides; Photonic crystals; Plasma temperature; Silicon;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics, 2007. CLEO 2007. Conference on
  • Conference_Location
    Baltimore, MD
  • Print_ISBN
    978-1-55752-834-6
  • Type

    conf

  • DOI
    10.1109/CLEO.2007.4452982
  • Filename
    4452982
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3011813