Title :
Polysilicon-on-Insulator Photonic Devices
Author :
Preston, Kyle ; Lipson, Michal
Author_Institution :
Cornell Univ., Ithaca
Abstract :
We demonstrate ring resonators with Q = 4,000 using poly crystalline silicon annealed at a low temperature of 600degC, which is compatible with standard CMOS processes.
Keywords :
CMOS integrated circuits; integrated optics; laser beam annealing; optical resonators; CMOS process; annealing; photonic devices; polysilicon on insulator; ring resonators; temperature 600 degC; Annealing; Optical devices; Optical losses; Optical resonators; Optical ring resonators; Optical scattering; Optical waveguides; Photonic crystals; Plasma temperature; Silicon;
Conference_Titel :
Lasers and Electro-Optics, 2007. CLEO 2007. Conference on
Conference_Location :
Baltimore, MD
Print_ISBN :
978-1-55752-834-6
DOI :
10.1109/CLEO.2007.4452982
