Title :
Self-zooming stable stage with sub-nm resolution using femtosecond frequency comb
Author :
Kajima, Mariko ; Matsumoto, Hirokazu
Author_Institution :
Nat. Inst. of Adv. Ind. Sci. & Technol. (AIST), Tsukuba
Abstract :
A positioning system based on self-zooming laser interferometer is presented. It uses diode lasers locked to two modes of fs-comb. It provides sub-nm resolution and sub-nm accuracy.
Keywords :
laser mode locking; light interferometers; position control; semiconductor lasers; diode lasers; femtosecond frequency comb; laser mode locking; positioning system; self-zooming laser interferometer; self-zooming stable stage; sub-nm resolution; Diode lasers; Frequency; Laser mode locking; Length measurement; Optical interferometry; Optical modulation; Optical refraction; Optical variables control; Ultrafast optics; X-ray lasers;
Conference_Titel :
Lasers and Electro-Optics, 2007. CLEO 2007. Conference on
Conference_Location :
Baltimore, MD
Print_ISBN :
978-1-55752-834-6
DOI :
10.1109/CLEO.2007.4453022
