Title :
Electrical modeling of HF coupled inductors supplying a double frequency inductive plasma reactor
Author :
Colpo, Pascal ; Ernst, Roland ; Keradec, Jean-Pierre
Author_Institution :
COBRAIN NV, Leuven, Belgium
Abstract :
A new inductive plasma reactor has been developed for metal coating. It combines magnetic plasma generation at 13.56 MHz and induction heating at 100 kHz. The unavoidable coupling of the two coaxial coils allows one electrical generator to force power in the other, compromising the reliability of the system, except if rejecting filters are inserted. Therefore, an equivalent circuit of the double coil set is needed to specify and design the necessary filters. The aim of this paper is to present and justify the electrical representation of this very special high frequency transformer which have been used successfully
Keywords :
coils; equivalent circuits; high-frequency transformers; induction heating; inductors; plasma CVD; plasma devices; plasma interactions; plasma production; 100 kHz; 13.56 MHz; HF coupled inductors; coaxial coils; double coil set; double frequency inductive plasma reactor; electrical generator; electrical modeling; electrical representation; equivalent circuit; high frequency transformer; induction heating; magnetic plasma generation; metal coating; plasma interactions; rejecting filters; system reliability; unavoidable coupling; Coatings; Cogeneration; Coils; Filters; Hafnium; Induction generators; Inductors; Magnetic separation; Plasmas; Power system reliability;
Conference_Titel :
Applied Power Electronics Conference and Exposition, 1997. APEC '97 Conference Proceedings 1997., Twelfth Annual
Conference_Location :
Atlanta, GA
Print_ISBN :
0-7803-3704-2
DOI :
10.1109/APEC.1997.575759
