Title :
Micro balloon actuators for aerodynamic control
Author :
Grosjean, C. ; Lee, G.B. ; Hong, W. ; Tai, Y.C. ; Ho, C.M.
Author_Institution :
Caltech Micromachining Lab., California Inst. of Technol., Pasadena, CA, USA
Abstract :
A robust, large-force, large-deflection micro balloon actuator for aerodynamic (manoeuvring) control of transonic aircraft has been developed. Using a novel process, high yield linear arrays of silicone balloons on a robust silicon substrate have been fabricated that can deflect vertically in excess of one mm. Balloon actuators have been tested under cyclic conditions to assess reliability. The actuators have been characterized in a wind tunnel to assess their suitability as aerodynamic control surfaces and flight-tested on a jet fighter to assess their resistance to varied temperatures and pressures at high velocity
Keywords :
aircraft control; elemental semiconductors; mechanical testing; microactuators; silicon; silicones; transonic flow; wind tunnels; Si; aerodynamic control; aerodynamic control surfaces; cyclic conditions; high yield linear arrays; jet fighter; manoeuvring control; micro balloon actuators; pressures; reliability; silicon substrate; silicone balloons; transonic aircraft; wind tunnel; Actuators; Aerodynamics; Aerospace control; Aircraft; Robust control; Robustness; Silicon; Surface resistance; Testing; Velocity control;
Conference_Titel :
Micro Electro Mechanical Systems, 1998. MEMS 98. Proceedings., The Eleventh Annual International Workshop on
Conference_Location :
Heidelberg
Print_ISBN :
0-7803-4412-X
DOI :
10.1109/MEMSYS.1998.659748