Title :
AutoMM: automatic generation of dynamic macromodels for MEMS devices
Author :
Swart, N.R. ; Bart, S.F. ; Zaman, M.H. ; Mariappan, M. ; Gilbert, J.R. ; Murphy, D.
Author_Institution :
Analog Devices Inc., Cambridge, MA, USA
Abstract :
We report on the development of a new CAD tool, AutoMM, which supports the automatic generation of dynamic macromodels for a broad class of MEMS devices. The tool is demonstrated by producing a 2 DOF macromodel of the Analog Devices ADXL76 airbag accelerometer. Considerably improved functionality is obtained over earlier models of the device, including prediction of cross-axis response. Excellent agreement is obtained between simulations and measured data
Keywords :
CAD; accelerometers; electrical engineering computing; mechanical engineering computing; micromechanical devices; 3D; ADXL76 airbag accelerometer; Analog Devices; AutoMM; DOF macromodel; MEMS devices; automatic generation; cross-axis response; dynamic macromodels; Acceleration; Accelerometers; Circuit simulation; Electrostatics; Equations; Mathematical model; Microelectromechanical devices; Micromechanical devices; Polynomials; Springs;
Conference_Titel :
Micro Electro Mechanical Systems, 1998. MEMS 98. Proceedings., The Eleventh Annual International Workshop on
Conference_Location :
Heidelberg
Print_ISBN :
0-7803-4412-X
DOI :
10.1109/MEMSYS.1998.659750
