Title :
The influence of surface roughness of Bragg reflector layers on characteristics of microwave solidly mounted resonator
Author :
Tanskaya, T.N. ; Zima, V.N. ; Kozlov, A.G.
Author_Institution :
PJSC Omskiy Nauchno Issledovatelskiy Inst. Priborostroenia (ONIIP), Omsk, Russia
Abstract :
The bulk acoustic wave resonator with the acoustic Bragg reflector is considered. The materials for the Bragg reflector layers are chosen. These materials are molybdenum for the high-impedance acoustic layers and aluminum for the low-impedance ones. The surface roughness of the molybdenum and aluminum thin-film layers are investigated. The influence of the surface roughness of these layers on the admittance and the quality factor of the acoustic wave resonator with the Bragg reflector is considered.
Keywords :
distributed Bragg reflectors; molybdenum; radio networks; thin films; Bragg reflector layers; acoustic Bragg reflector; aluminum thin film layers; bulk acoustic wave resonator; microwave solidly mounted resonator; molybdenum; surface roughness; wireless communication system; Acoustics; Aluminum; Films; Microwave communication; Rough surfaces; Surface impedance; Surface roughness; acoustic Bragg reflector; aluminum film; molybdenum film; quality factor; solidly mounted resonator; surface roughness;
Conference_Titel :
Control and Communications (SIBCON), 2015 International Siberian Conference on
Conference_Location :
Omsk
Print_ISBN :
978-1-4799-7102-2
DOI :
10.1109/SIBCON.2015.7147233
