DocumentCode
3013986
Title
Soft X-Ray Contact Imaging of Thin Films by a Laser-Plasma Source
Author
Stagira, S. ; Calegari, F. ; Benedetti, E. ; Cabanillas, J. ; Nisoli, M. ; Sansone, G. ; Valentini, G. ; Vozzi, C. ; Silvestri, S. De ; Poletto, L. ; Villoresi, P. ; Faenov, A. ; Pikuz, T.
Author_Institution
Nat. Lab. for Ultrafast & Ultraintense Opt. Sci., Milan
fYear
2007
fDate
6-11 May 2007
Firstpage
1
Lastpage
2
Abstract
Quantitative analysis of nanometric films is achieved by soft X-ray imaging using a laser-plasma source and LiF crystals as detectors. Excitation of color center fluorescence in exposed LiF allows image detection with sub-micron resolution.
Keywords
X-ray apparatus; X-ray imaging; X-ray optics; colour centres; fluorescence; foils; lithium compounds; nanostructured materials; plasma X-ray sources; plasma production by laser; thin films; LiF; color center fluorescence excitation; crystal detectors; image detection; image resolution; laser-plasma soft X-ray source; laser-plasma source; nanometer foils; nanometric film analysis; soft X-ray contact imaging; soft X-ray detector; thin films imaging; Crystals; Image analysis; Laser excitation; Optical imaging; Solid lasers; Transistors; X-ray detection; X-ray detectors; X-ray imaging; X-ray lasers;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics, 2007. CLEO 2007. Conference on
Conference_Location
Baltimore, MD
Print_ISBN
978-1-55752-834-6
Type
conf
DOI
10.1109/CLEO.2007.4453104
Filename
4453104
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