Title :
Silicon based photonic quantum dots
Author :
Chen, Kunji ; Chen, San ; Qian, Bo ; Zhang, Xiangao ; Li, Wei ; Xu, Jun ; Huang, Xinfan
Author_Institution :
Nat. Lab. of Solid State Microstructures, Nanjing Univ., Nanjing
Abstract :
We use a patterned conformal deposition technique to fabricate Si-based 3D optical microcavities. The size-dependent confined photonic modes were observed when the size is reduced to 1.0 mum which is similar to the quantum effect of electronic states in semiconductor quantum dots.
Keywords :
elemental semiconductors; micro-optics; microcavities; optical fabrication; photonic band gap; plasma CVD; semiconductor quantum dots; silicon; 3D optical microcavity fabrication; Si; confined photonic modes; electronic states; patterned conformal deposition method; plasma-enhanced chemical-vapor deposition system; quantum effect; semiconductor quantum dot; silicon based photonic quantum dots; Microcavities; Optical films; Optical refraction; Optical scattering; Optical variables control; Quantum dots; Resonance; Scanning electron microscopy; Silicon; Substrates;
Conference_Titel :
Group IV Photonics, 2008 5th IEEE International Conference on
Conference_Location :
Cardiff
Print_ISBN :
978-1-4244-1769-8
Electronic_ISBN :
978-1-4244-1768-1
DOI :
10.1109/GROUP4.2008.4638111
