DocumentCode
3014137
Title
Contact materials for microrelays
Author
Schimkat, Joachim
Author_Institution
Eng. Office Schimkat, Berlin, Germany
fYear
1998
fDate
25-29 Jan 1998
Firstpage
190
Lastpage
194
Abstract
The design of a microrelay actuator has to be based on the characteristic data of the contact material used. These data were determined experimentally at Au, AuNi5 and Rh switching electric contacts. The samples were cleaned with good result using the “Schaltreinigung” procedure. A new precision measurement technique was developed that enables investigations of electric contacts at contact forces varying continuously in the range from 0.1 mN to more than 10 mN. It was found that AuNi5 and Rh are contact materials well suited for microrelays, whereas Au is not appropriate due to its high adherence. Stable contact and reliable opening are provided by forces altogether as low as 0.6 mN. The experimental data were used successfully in dimensioning the moving wedge actuator used in silicon microrelays
Keywords
electrical contacts; gold; gold alloys; microactuators; relays; rhodium; Au; AuNi; AuNi5; Rh; Rh switching electric contacts; Schaltreinigung; Si microrelays; adherence; contact forces; contact material; dimensioning; electric contacts; microrelay actuator; moving wedge actuator; precision measurement; reliable; Actuators; Contact resistance; Electric resistance; Electrical resistance measurement; Force control; Force measurement; Force sensors; Gold; Microrelays; Surface resistance;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 1998. MEMS 98. Proceedings., The Eleventh Annual International Workshop on
Conference_Location
Heidelberg
ISSN
1084-6999
Print_ISBN
0-7803-4412-X
Type
conf
DOI
10.1109/MEMSYS.1998.659752
Filename
659752
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