• DocumentCode
    3014137
  • Title

    Contact materials for microrelays

  • Author

    Schimkat, Joachim

  • Author_Institution
    Eng. Office Schimkat, Berlin, Germany
  • fYear
    1998
  • fDate
    25-29 Jan 1998
  • Firstpage
    190
  • Lastpage
    194
  • Abstract
    The design of a microrelay actuator has to be based on the characteristic data of the contact material used. These data were determined experimentally at Au, AuNi5 and Rh switching electric contacts. The samples were cleaned with good result using the “Schaltreinigung” procedure. A new precision measurement technique was developed that enables investigations of electric contacts at contact forces varying continuously in the range from 0.1 mN to more than 10 mN. It was found that AuNi5 and Rh are contact materials well suited for microrelays, whereas Au is not appropriate due to its high adherence. Stable contact and reliable opening are provided by forces altogether as low as 0.6 mN. The experimental data were used successfully in dimensioning the moving wedge actuator used in silicon microrelays
  • Keywords
    electrical contacts; gold; gold alloys; microactuators; relays; rhodium; Au; AuNi; AuNi5; Rh; Rh switching electric contacts; Schaltreinigung; Si microrelays; adherence; contact forces; contact material; dimensioning; electric contacts; microrelay actuator; moving wedge actuator; precision measurement; reliable; Actuators; Contact resistance; Electric resistance; Electrical resistance measurement; Force control; Force measurement; Force sensors; Gold; Microrelays; Surface resistance;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro Electro Mechanical Systems, 1998. MEMS 98. Proceedings., The Eleventh Annual International Workshop on
  • Conference_Location
    Heidelberg
  • ISSN
    1084-6999
  • Print_ISBN
    0-7803-4412-X
  • Type

    conf

  • DOI
    10.1109/MEMSYS.1998.659752
  • Filename
    659752