Title :
Fabrication of Silicon Inverse Woodpile Photonic Crystals
Author :
Hermatschweiler, M. ; Wegener, M. ; Ozin, G.A. ; Ledermann, A. ; von Freymann, G.
Author_Institution :
Univ. Karlsruhe (TH), Karlsruhe
Abstract :
We fabricate silicon inverse woodpile structures for the first time. Direct laser writing of polymeric templates and a novel silicon-single-inversion procedure lead to structures with gap/midgap ratios of 14.2 % centered at 2.5 mum wavelength.
Keywords :
laser materials processing; photonic crystals; silicon; Si; direct laser writing; polymeric templates; silicon inverse woodpile photonic crystals; silicon inverse woodpile structures; silicon-single-inversion procedure; Coatings; Fabrication; Filling; Optical polymers; Optical refraction; Optical scattering; Photonic crystals; Silicon compounds; Temperature; Writing;
Conference_Titel :
Lasers and Electro-Optics, 2007. CLEO 2007. Conference on
Conference_Location :
Baltimore, MD
Print_ISBN :
978-1-55752-834-6
DOI :
10.1109/CLEO.2007.4453118
