Title :
Feasibility study for development of a carbon-based MEMS/NEMS using HOPG and a MEMS fabrication process
Author :
Sone, J. ; Totsu, Kentaro
Author_Institution :
Fac. of Eng., Tokyo Polytech. Univ., Atsugi, Japan
Abstract :
We aim to develop a process technology for constructing a carbon MEMS/NEMS device using HOPG without a high-temperature and high-energy process. An HOPG micro-sheet was prepared by exfoliation. In addition, the cantilevers and double-clamped beams were patterned using a photoresist. The HOPG micro-sheet was adhered using a tantalum layer. We succeeded in the fabrication of cantilevers and double-clamped beams by controlling the thickness and surface roughness of the HOPG micro-sheet. The measured first resonance frequency of the constructed cantilever was near graphite property. We plan to develop more precise nano-scale devices in the future.
Keywords :
cantilevers; graphite; micromechanical devices; nanoelectromechanical devices; nanopatterning; photoresists; surface roughness; tantalum; C; HOPG microsheet; MEMS fabrication process; Ta; cantilevers; carbon-based MEMS-NEMS; double-clamped beams; graphite property; high-energy process; high-temperature process; photoresist; process technology; surface roughness; tantalum layer; Carbon; Fabrication; Frequency measurement; Graphite; Micromechanical devices; Nanoscale devices; Resonant frequency;
Conference_Titel :
Nanotechnology (IEEE-NANO), 2013 13th IEEE Conference on
Conference_Location :
Beijing
Print_ISBN :
978-1-4799-0675-8
DOI :
10.1109/NANO.2013.6720799
