Feasibility study for development of a carbon-based MEMS/NEMS using HOPG and a MEMS fabrication process

Author

Sone, J. ; Totsu, Kentaro

Author_Institution

Fac. of Eng., Tokyo Polytech. Univ., Atsugi, Japan

fYear

2013

fDate

5-8 Aug. 2013

Firstpage

1018

Lastpage

1021

Abstract

We aim to develop a process technology for constructing a carbon MEMS/NEMS device using HOPG without a high-temperature and high-energy process. An HOPG micro-sheet was prepared by exfoliation. In addition, the cantilevers and double-clamped beams were patterned using a photoresist. The HOPG micro-sheet was adhered using a tantalum layer. We succeeded in the fabrication of cantilevers and double-clamped beams by controlling the thickness and surface roughness of the HOPG micro-sheet. The measured first resonance frequency of the constructed cantilever was near graphite property. We plan to develop more precise nano-scale devices in the future.

Keywords

cantilevers; graphite; micromechanical devices; nanoelectromechanical devices; nanopatterning; photoresists; surface roughness; tantalum; C; HOPG microsheet; MEMS fabrication process; Ta; cantilevers; carbon-based MEMS-NEMS; double-clamped beams; graphite property; high-energy process; high-temperature process; photoresist; process technology; surface roughness; tantalum layer; Carbon; Fabrication; Frequency measurement; Graphite; Micromechanical devices; Nanoscale devices; Resonant frequency;

fLanguage

English

Publisher

ieee

Conference_Titel

Nanotechnology (IEEE-NANO), 2013 13th IEEE Conference on

Conference_Location

Beijing

ISSN

1944-9399

Print_ISBN

978-1-4799-0675-8

Type

conf

DOI

10.1109/NANO.2013.6720799

Filename

6720799