Title :
Waveguide coupled Ge-on-oxide photodetectors for integrated optical links
Author :
Reshotko, Miriam R. ; Block, Bruce A. ; Ben Jin ; Chang, Peter
Author_Institution :
Intel Corp., Hillsboro, OR
Abstract :
We demonstrate Ge MSM photodetectors with responsivities of 0.9 A/W at 1310 nm and capable of data rates of 20 Gb/s. Direct Ge on oxide deposition makes these photodetectors potentially suitable for CMOS back-end optical links.
Keywords :
CMOS integrated circuits; integrated optics; optical links; optical waveguides; photodetectors; CMOS back-end optical links; integrated optical links; waveguide coupled Ge-on-oxide photodetectors; CMOS process; Detectors; Dielectric substrates; III-V semiconductor materials; Optical coupling; Optical fiber communication; Optical waveguides; Photodetectors; Planar waveguides; Silicon;
Conference_Titel :
Group IV Photonics, 2008 5th IEEE International Conference on
Conference_Location :
Cardiff
Print_ISBN :
978-1-4244-1769-8
Electronic_ISBN :
978-1-4244-1768-1
DOI :
10.1109/GROUP4.2008.4638138
