Title :
High quality coupled ring resonators based on silicon clusters slot waveguide
Author :
Lebour, Youcef ; Guider, Romain ; Jordana, Emmanuel ; Fedeli, Jean-Marc ; Pellegrino, Paolo ; Hernández, Sergi ; Garrido, Blas ; Daldosso, Nicola ; Pavesi, Lorenzo
Author_Institution :
Dept. d´´Electron., Univ. de Barcelona, Barcelona
Abstract :
High Q factor ring resonators based on Si clusters sandwich slot-waveguide structure have been fabricated by standard DUV lithography. These devices are considered an important step towards the demonstration of an all optical logic gate.
Keywords :
Q-factor; elemental semiconductors; optical fabrication; optical logic; optical resonators; optical waveguides; silicon; ultraviolet lithography; DUV lithography; Q factor; Si; coupled ring resonators; optical logic gate; sandwich structure; silicon clusters slot waveguide; Lithography; Nonlinear optics; Optical refraction; Optical ring resonators; Optical sensors; Optical variables control; Optical waveguides; Refractive index; Silicon; Waveguide discontinuities; Ring resonators; Si clusters; deep UV lithography; sandwich slot waveguides;
Conference_Titel :
Group IV Photonics, 2008 5th IEEE International Conference on
Conference_Location :
Cardiff
Print_ISBN :
978-1-4244-1769-8
Electronic_ISBN :
978-1-4244-1768-1
DOI :
10.1109/GROUP4.2008.4638149
