DocumentCode :
3014773
Title :
Box-shaped and A-shaped low-loss waveguides in Si3N4/SiO2 TriPleX technology
Author :
Morichetti, F. ; Melloni, A. ; Martinelli, M. ; Leinse, A. ; Geuzebroek, D.H. ; Heideman, R.G.
fYear :
2008
fDate :
17-19 Sept. 2008
Firstpage :
218
Lastpage :
220
Abstract :
Dielectric waveguides with a box-shaped and an A-shaped cross-section realized in the emerging Si3N4/SiO2 TriPleX technology are experimentally compared. Box-shaped waveguides offer the best compromise between low loss, low polarization-dependent loss and low birefringence.
Keywords :
birefringence; integrated optics; light polarisation; optical losses; optical waveguides; silicon compounds; A-shaped waveguide; Si3N4-SiO2; TriPleX technology; box-shaped waveguide; dielectric waveguides; low-loss waveguides; polarization-dependent loss; waveguide birefringence; Birefringence; CMOS technology; Nonhomogeneous media; Optical device fabrication; Optical waveguides; Polarization; Propagation losses; Refractive index; Silicon; Wires;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Group IV Photonics, 2008 5th IEEE International Conference on
Conference_Location :
Cardiff
Print_ISBN :
978-1-4244-1769-8
Electronic_ISBN :
978-1-4244-1768-1
Type :
conf
DOI :
10.1109/GROUP4.2008.4638150
Filename :
4638150
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3014773
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