• DocumentCode
    3014773
  • Title

    Box-shaped and A-shaped low-loss waveguides in Si3N4/SiO2 TriPleX technology

  • Author

    Morichetti, F. ; Melloni, A. ; Martinelli, M. ; Leinse, A. ; Geuzebroek, D.H. ; Heideman, R.G.

  • fYear
    2008
  • fDate
    17-19 Sept. 2008
  • Firstpage
    218
  • Lastpage
    220
  • Abstract
    Dielectric waveguides with a box-shaped and an A-shaped cross-section realized in the emerging Si3N4/SiO2 TriPleX technology are experimentally compared. Box-shaped waveguides offer the best compromise between low loss, low polarization-dependent loss and low birefringence.
  • Keywords
    birefringence; integrated optics; light polarisation; optical losses; optical waveguides; silicon compounds; A-shaped waveguide; Si3N4-SiO2; TriPleX technology; box-shaped waveguide; dielectric waveguides; low-loss waveguides; polarization-dependent loss; waveguide birefringence; Birefringence; CMOS technology; Nonhomogeneous media; Optical device fabrication; Optical waveguides; Polarization; Propagation losses; Refractive index; Silicon; Wires;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Group IV Photonics, 2008 5th IEEE International Conference on
  • Conference_Location
    Cardiff
  • Print_ISBN
    978-1-4244-1769-8
  • Electronic_ISBN
    978-1-4244-1768-1
  • Type

    conf

  • DOI
    10.1109/GROUP4.2008.4638150
  • Filename
    4638150
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3014773