• DocumentCode
    3015084
  • Title

    The elasto-optic and the thermo-optic effect in silicon nanowires

  • Author

    Amthor, J. ; Horn, O. ; Lipka, T. ; Mueller, J.

  • Author_Institution
    Dept. of Micro Syst. Technol., Hamburg Univ. of Technol., Hamburg
  • fYear
    2008
  • fDate
    17-19 Sept. 2008
  • Firstpage
    265
  • Lastpage
    267
  • Abstract
    The elasto-optic and the thermo-optic effect in silicon nanowires is demonstrated using Mach-Zehnder interferometers. The nanowires are placed on undercut SiO2 membranes which can be deflected electrostatically.
  • Keywords
    elemental semiconductors; nanowires; photoelasticity; silicon; thermo-optical effects; Si; elasto-optic effect; silicon nanowires; thermo-optic effect; Biomembranes; Lithography; Nanowires; Optical refraction; Optical ring resonators; Optical scattering; Optical waveguides; Silicon on insulator technology; Sputter etching; Thermooptic effects;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Group IV Photonics, 2008 5th IEEE International Conference on
  • Conference_Location
    Cardiff
  • Print_ISBN
    978-1-4244-1769-8
  • Electronic_ISBN
    978-1-4244-1768-1
  • Type

    conf

  • DOI
    10.1109/GROUP4.2008.4638167
  • Filename
    4638167