DocumentCode
3015084
Title
The elasto-optic and the thermo-optic effect in silicon nanowires
Author
Amthor, J. ; Horn, O. ; Lipka, T. ; Mueller, J.
Author_Institution
Dept. of Micro Syst. Technol., Hamburg Univ. of Technol., Hamburg
fYear
2008
fDate
17-19 Sept. 2008
Firstpage
265
Lastpage
267
Abstract
The elasto-optic and the thermo-optic effect in silicon nanowires is demonstrated using Mach-Zehnder interferometers. The nanowires are placed on undercut SiO2 membranes which can be deflected electrostatically.
Keywords
elemental semiconductors; nanowires; photoelasticity; silicon; thermo-optical effects; Si; elasto-optic effect; silicon nanowires; thermo-optic effect; Biomembranes; Lithography; Nanowires; Optical refraction; Optical ring resonators; Optical scattering; Optical waveguides; Silicon on insulator technology; Sputter etching; Thermooptic effects;
fLanguage
English
Publisher
ieee
Conference_Titel
Group IV Photonics, 2008 5th IEEE International Conference on
Conference_Location
Cardiff
Print_ISBN
978-1-4244-1769-8
Electronic_ISBN
978-1-4244-1768-1
Type
conf
DOI
10.1109/GROUP4.2008.4638167
Filename
4638167
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