Title :
The elasto-optic and the thermo-optic effect in silicon nanowires
Author :
Amthor, J. ; Horn, O. ; Lipka, T. ; Mueller, J.
Author_Institution :
Dept. of Micro Syst. Technol., Hamburg Univ. of Technol., Hamburg
Abstract :
The elasto-optic and the thermo-optic effect in silicon nanowires is demonstrated using Mach-Zehnder interferometers. The nanowires are placed on undercut SiO2 membranes which can be deflected electrostatically.
Keywords :
elemental semiconductors; nanowires; photoelasticity; silicon; thermo-optical effects; Si; elasto-optic effect; silicon nanowires; thermo-optic effect; Biomembranes; Lithography; Nanowires; Optical refraction; Optical ring resonators; Optical scattering; Optical waveguides; Silicon on insulator technology; Sputter etching; Thermooptic effects;
Conference_Titel :
Group IV Photonics, 2008 5th IEEE International Conference on
Conference_Location :
Cardiff
Print_ISBN :
978-1-4244-1769-8
Electronic_ISBN :
978-1-4244-1768-1
DOI :
10.1109/GROUP4.2008.4638167
