Title :
Amorphous silicon spot-size converters fabricated with a shadow mask
Author :
Lipka, T. ; Harke, A. ; Horn, O. ; Amthor, J. ; Müller, J. ; Krause, M.
Author_Institution :
Dept. of Micro Syst. Technol., Hamburg Univ. of Technol., Hamburg
Abstract :
A rib-like spot-size converter was fabricated with a KOH etched shadow mask. The improvement in coupling and an expansion of the spot-size were evaluated with simulations and confirmed by transmission loss measurements.
Keywords :
amorphous semiconductors; convertors; elemental semiconductors; integrated optics; silicon; amorphous silicon spot-size converters; integrated photonic circuits; shadow mask; Amorphous silicon; Etching; Optical fiber couplers; Optical fiber polarization; Optical losses; Optical materials; Optical refraction; Optical variables control; Optical waveguides; Predictive models;
Conference_Titel :
Group IV Photonics, 2008 5th IEEE International Conference on
Conference_Location :
Cardiff
Print_ISBN :
978-1-4244-1769-8
Electronic_ISBN :
978-1-4244-1768-1
DOI :
10.1109/GROUP4.2008.4638183
