• DocumentCode
    3015538
  • Title

    Green, self-luminescent Tb3+ doped silicon oxy-nitride microdisk on Si chip for biosensor applications

  • Author

    Jeong, Hoon ; Shin, Jung H. ; Sung, Gun-Yong

  • Author_Institution
    Dept. of Phys., Korea Adv. Inst. of Sci. & Technol. (KAIST), Daejeon
  • fYear
    2008
  • fDate
    17-19 Sept. 2008
  • Firstpage
    335
  • Lastpage
    337
  • Abstract
    We design and fabricate green, self-luminescent Tb-doped SiOxNy microdisks on Si chip for low-cost, all-Si biosensor applications. WGM was obtained via top-pumping and side-PL measurements, and obtained Q-factor was 220.
  • Keywords
    Q-factor; biosensors; micro-optics; microcavities; optical materials; optical pumping; optical resonators; photoluminescence; silicon compounds; terbium; whispering gallery modes; Q-factor; Si chip; SiON:Tb; Tb3+ doped silicon oxy-nitride microdisk; WGM; biosensor; self-luminescence; side-PL; top-pumping; Biosensors; Finite difference methods; Luminescence; Microcavities; Optical resonators; Optical sensors; Q factor; Resonance; Semiconductor device measurement; Silicon;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Group IV Photonics, 2008 5th IEEE International Conference on
  • Conference_Location
    Cardiff, Wales
  • Print_ISBN
    978-1-4244-1769-8
  • Electronic_ISBN
    978-1-4244-1768-1
  • Type

    conf

  • DOI
    10.1109/GROUP4.2008.4638191
  • Filename
    4638191