• DocumentCode
    3015769
  • Title

    Silicon photonics front-end integration in high-speed 0.25μm SiGe BiCMOS

  • Author

    Zimmermann, Lars ; Voigt, Karsten ; Winzer, Georg ; Wolansky, Dirk ; Geisler, Sebastian ; Richter, Harald ; Tillack, Bernd

  • Author_Institution
    Fachgebiet Hochfrequenztech. HFT4, Tech. Univ. Berlin, Berlin
  • fYear
    2008
  • fDate
    17-19 Sept. 2008
  • Firstpage
    374
  • Lastpage
    376
  • Abstract
    Modular integration of photonic functionality in the front-end of line of a qualified 0.25 mum SiGe BiCMOS technology is considered. First measurements of electronic & waveguide test structures are presented.
  • Keywords
    BiCMOS integrated circuits; Ge-Si alloys; semiconductor materials; BiCMOS; SiGe; photonic functionality; silicon photonics; waveguide test structure; wavelength 0.25 micron; BiCMOS integrated circuits; CMOS technology; Fabrication; Frequency; Germanium silicon alloys; Heterojunction bipolar transistors; Monolithic integrated circuits; Optical waveguides; Photonics; Silicon germanium;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Group IV Photonics, 2008 5th IEEE International Conference on
  • Conference_Location
    Cardiff
  • Print_ISBN
    978-1-4244-1769-8
  • Electronic_ISBN
    978-1-4244-1768-1
  • Type

    conf

  • DOI
    10.1109/GROUP4.2008.4638204
  • Filename
    4638204
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3015769