Title :
Silicon photonics front-end integration in high-speed 0.25μm SiGe BiCMOS
Author :
Zimmermann, Lars ; Voigt, Karsten ; Winzer, Georg ; Wolansky, Dirk ; Geisler, Sebastian ; Richter, Harald ; Tillack, Bernd
Author_Institution :
Fachgebiet Hochfrequenztech. HFT4, Tech. Univ. Berlin, Berlin
Abstract :
Modular integration of photonic functionality in the front-end of line of a qualified 0.25 mum SiGe BiCMOS technology is considered. First measurements of electronic & waveguide test structures are presented.
Keywords :
BiCMOS integrated circuits; Ge-Si alloys; semiconductor materials; BiCMOS; SiGe; photonic functionality; silicon photonics; waveguide test structure; wavelength 0.25 micron; BiCMOS integrated circuits; CMOS technology; Fabrication; Frequency; Germanium silicon alloys; Heterojunction bipolar transistors; Monolithic integrated circuits; Optical waveguides; Photonics; Silicon germanium;
Conference_Titel :
Group IV Photonics, 2008 5th IEEE International Conference on
Conference_Location :
Cardiff
Print_ISBN :
978-1-4244-1769-8
Electronic_ISBN :
978-1-4244-1768-1
DOI :
10.1109/GROUP4.2008.4638204
