Title :
Scanning tunneling microscopy and spectroscopy studies of self assembled sub 10 nm copper-silicide nanostructures on Si(110)
Author :
Poh-Keong Ng ; Fisher, Brent ; Lilley, Carmen M.
Author_Institution :
Dept. of Electr. & Comput. Eng., Univ. of Illinois at Chicago, Chicago, IL, USA
Abstract :
Self assembled Cu3Si nanoislands and nanowires on Si(110) were fabricated with electron beam evaporation in ultra high vacuum while annealing the substrate at 600°C. Scanning tunneling microscopy technique was used to study the resultant nanostructures of sub 10 nm size. Surface images of a nanoisland and nanowire were obtained. The former showed evidence of single crystalline structures. The length, width, and height dimensions of the nanoisland and nanowire were ~100 nm × 30 nm × 6 nm and 75 nm × 12.5 nm × 3 nm, respectively. Scanning tunneling spectroscopy on both the nanostructures performed to obtain their local density of states. Both nanostructures did not exhibit metallic behavior.
Keywords :
annealing; copper compounds; electronic density of states; evaporation; nanofabrication; nanowires; scanning tunnelling microscopy; scanning tunnelling spectroscopy; self-assembly; Cu3Si; Si; Si(110) surface images; electron beam evaporation; local density of states; metallic behavior; nanoisland dimensions; nanoisland length; nanoisland width; scanning tunneling microscopy; scanning tunneling spectroscopy; self assembled copper-silicide nanostructures; self assembled nanoisland fabrication; self assembled nanowire fabrication; single crystalline structures; size 10 nm; substrate annealing; ultra high vacuum medium; Nanowires; Self-assembly; Semiconductor device measurement; Silicides; Silicon; Tunneling; Cu3Si; Self assembly; nanoisland; nanowire and scanning tunneling microscopy (STM);
Conference_Titel :
Nanotechnology (IEEE-NANO), 2013 13th IEEE Conference on
Conference_Location :
Beijing
Print_ISBN :
978-1-4799-0675-8
DOI :
10.1109/NANO.2013.6720872