Title :
Nano enabled 3D integration of on-chip ESD protection for ICs
Author :
Li Wang ; Chen Zhang ; Zongyu Dong ; Rui Ma ; Xin Wang ; Zitao Shi ; Hui Zhao ; Jian Liu ; Fei Lu ; Wang, Aiping ; Yuhua Cheng
Abstract :
This paper reviews recent advances in 3D on-chip electrostatic discharge (ESD) protection design for integrated circuits (IC). Traditional ESD protection relies on PN-junction-based structures, which have inherent disadvantages including fixed ESD triggering and parasitic effects. New ESD protection mechanisms and structures, including nano crystal dots and nano crossbar concepts, provide alternative non-traditional ESD protection solutions enabling post-Si field programmable and above-IC ESD circuit designs. The new ESD protection concepts represent a paradigm change in ESD protection designs and are potential solutions to next-generation nano circuits and systems.
Keywords :
electrostatic discharge; integrated circuit design; integrated circuit reliability; nanostructured materials; nanotechnology; above-IC ESD circuit design; electrostatic discharge protection design; integrated circuits; nanocrossbar concept; nanocrystal dot; nanoenabled 3D integration; nontraditional ESD protection solutions; on-chip ESD protection; Arrays; Electrostatic discharges; Integrated circuits; Programming; SONOS devices; Switches; Testing;
Conference_Titel :
Nanotechnology (IEEE-NANO), 2013 13th IEEE Conference on
Conference_Location :
Beijing
Print_ISBN :
978-1-4799-0675-8
DOI :
10.1109/NANO.2013.6720875