Title :
Fabrication and characterization of resonant cavity enhanced silicon photodetectors at 1.55 μm
Author :
Casalino, M. ; Sirleto, L. ; Moretti, L. ; Gioffrè, M. ; Coppola, G. ; Iodice, M. ; Rendina, I.
Author_Institution :
Consiglio Naz. delle Ric., IMM sez. Napoli, Naples
Abstract :
In this paper the realization and the characterization of a new kind of resonant cavity enhanced photodetector (RCE), fully compatible with silicon microelectronic technologies and working at 1.55 mum, are reported.
Keywords :
cavity resonators; elemental semiconductors; integrated optoelectronics; optical fabrication; optical resonators; photodetectors; silicon; RCE fabrication; Si; resonant cavity enhanced silicon photodetectors characterization; silicon microelectronic technologies; wavelength 1.55 mum; Electrons; Fabrication; Infrared imaging; Iron; Mirrors; Optical scattering; Photodetectors; Resonance; Schottky barriers; Silicon;
Conference_Titel :
Group IV Photonics, 2008 5th IEEE International Conference on
Conference_Location :
Cardiff
Print_ISBN :
978-1-4244-1769-8
Electronic_ISBN :
978-1-4244-1768-1
DOI :
10.1109/GROUP4.2008.4638217
