Title :
Fabrication of sensor based on MWCNT for NO2 and NH3 detection
Author :
Zhihui Wang ; Zexiang Chen ; Jijun Zhang ; Ningjiang Tang ; Jiaoping Cai
Author_Institution :
Sch. of Optoelectron. Inf., Univ. of Electron. Sci. & Technol. of China, Chengdu, China
Abstract :
MWCNT arrays fabricated by microwave plasma chemical vapor deposition on Si substrate with interdigital electrodes (IDE) were integrated into a resistive sensor design. A scanning electron microscope was used for the characterizations of MWCNTs. The gas response of MWCNT arrays to NH3 and NO2 gas were investigated at room temperature, respectively. The results exhibited that the thickness of MWCNT arrays controlled by growth time evidently affected gas sensing properties, and as-prepared MWCNT arrays presented low gas sensitivity to NH3 and NO2 gas, while the gas response can be significantly improved by anneal, which may be interpreted by the removal of by-products such as amorphous carbon or other functional groups on the MWCNTs surface.
Keywords :
ammonia; carbon nanotubes; electrochemical electrodes; gas sensors; nanosensors; plasma CVD; scanning electron microscopy; sensor arrays; C; IDE; MWCNT; NH3; NH3 detection; NO2; NO2 detection; Si; amorphous carbon; gas sensor fabrication; interdigital electrode; microwave plasma chemical vapor deposition; resistive sensor design; scanning electron microscope; sensor array; temperature 293 K to 298 K; Annealing; Carbon nanotubes; Electrodes; Scanning electron microscopy; Sensitivity; Surface morphology; Temperature sensors;
Conference_Titel :
Nanotechnology (IEEE-NANO), 2013 13th IEEE Conference on
Conference_Location :
Beijing
Print_ISBN :
978-1-4799-0675-8
DOI :
10.1109/NANO.2013.6720895
