A novel scale factor calibration method for a MEMS gyroscope based on virtual coriolis force

This paper presents a novel scale factor calibration method for a MEMS vibratory gyroscope based on virtual Coriolis force. Frequency and amplitude programmable voltage signals generated by the system can be used to emulate the Coriolis force induced by external angular rate signals. The system contributes to the development procedure of control system for gyroscope and provides a scale factor calibration method for the digital control system of a gyroscope. The experiment results show the digital system can acquire the frequency response of gyroscope and detect the frequency response of reference virtual rate signal effectively.