Title :
Stiffness controlled SU-8-based nanocomposites: Application for 1 GHz matching layer conception
Author :
Wang, S.-X. ; Carlier, J. ; Ndieguene, A. ; Campistron, P. ; Debavelaere, D.C. ; Soyer, C. ; Nongaillard, B. ; Zhao, X.-Z.
Author_Institution :
IEMN-DOAE, Univesite de Valenciennes, Valenciennes
Abstract :
The photoresist SU-8, often used in microtechnology, has been acoustically characterized at a frequency of 1 GHz thanks to thin-disk piezoelectric ZnO transducers. Acoustical characterization of SU-8-based nanocomposites made of SU-8 and nanosize TiO2 and/or SrTiO3 particles is presented. These nanocomposite materials would be used to achieve acoustical matching between silicon and water at a frequency of 1 GHz and of application for the integration of high frequency ultrasonic transducer in Lab-on-Chip for biological cell characterization.
Keywords :
acoustic impedance; bioMEMS; cellular biophysics; lab-on-a-chip; nanocomposites; nanoparticles; nanosensors; nanotechnology; photoresists; piezoelectric transducers; strontium compounds; titanium compounds; ultrasonic transducers; zinc compounds; SrTiO3; TiO2; ZnO; acoustical matching; acoustically characterized nanosized particle; biological cell characterization; frequency 1 GHz; high frequency ultrasonic transducer; lab-on-chip; photoresist; stiffness controlled SU-8-based nanocomposites; thin-disk piezoelectric transducer; Acoustic materials; Acoustic transducers; Biological materials; Frequency; Nanobioscience; Nanocomposites; Piezoelectric transducers; Resists; Silicon; Zinc oxide;
Conference_Titel :
Ultrasonics Symposium, 2008. IUS 2008. IEEE
Conference_Location :
Beijing
Print_ISBN :
978-1-4244-2428-3
Electronic_ISBN :
978-1-4244-2480-1
DOI :
10.1109/ULTSYM.2008.0163
