Title :
High temperature thin film thermocouples on different ceramic substrates
Author :
Xinhang Jin ; Binghe Ma ; Jinjun Deng ; Chengyu Ma
Author_Institution :
Key Lab. of Micro/Nano Syst. for Aerosp., Northwestern Polytech. Univ., Xi´an, China
Abstract :
This paper was directed at the effect of ceramic substrate on NiCr/NiSi film thermocouples fabricated on two ceramics substrate. One was on smooth Al2O3 substrate. The other was on silicon carbide ceramic reinforced by carbon fiber (CFCC-SiC). Since the CFCC-SiC has rough surface, the stress between the layer was greater and the thin film was easier to crack. With experiments the measure temperature of the thin film thermocouples on both of them could reach 700°C. Calibrate test data showed that the high-temperature stability of the thin film thermocouple on smooth Al2O3 substrate was much better than the other.
Keywords :
ceramics; nickel compounds; rough surfaces; temperature measurement; temperature sensors; thermocouples; thin film sensors; Al2O3; CFCC-SiC; NiCr-NiSi; calibration; carbon fiber; high temperature thin film thermocouple; high-temperature stability; rough surface; silicon carbide ceramic substrate; temperature measurement; Aluminum oxide; Ceramics; Films; Silicon carbide; Stress; Substrates; Temperature;
Conference_Titel :
Nano/Micro Engineered and Molecular Systems (NEMS), 2015 IEEE 10th International Conference on
Conference_Location :
Xi´an
DOI :
10.1109/NEMS.2015.7147406
