Piezo thermoelastic model for design optimization of resonant beams

In this study we present an analytical model to characterize the thermo elastic damping (TED) for beams in piezoelectric and pyroelectric materials for Q optimization. The model is based on the Euler Bernoulli equation and considers the constitutive equations for piezoelectric and pyroelectric materials. The analytical solution shows that due to the piezoelectric stiffening and the pyroelectric effect the Q-factor is penalized by 15%. The optimization of the Q-factor for piezoelectric beam based resonators is not only related to the beam dimensions, as for isotropic materials, but also to the electrode design.